We describe a new method for production of size-controlled Si fine particles that employs a pulsed RF silane discharge. Size, density, and morphology of particles prepared by this method are studied using scanning electron microscopy. Particles with a small size dispersion are produced in the size range from 10 to 120 nm and with densities above 107 cm-3. It is found that particles grow through three phases of nucleation, rapid growth, and growth saturation. Particles in two different size ranges coexist after the initiation of the rapid-growth phase above RF power of 40 W, and coagulation of particles plays a crucial role in the rapid-growth phase.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry