Production of size-controlled Si fine particles using pulsed RF discharge

Masaharu Shiratani, H. Kawasaki, T. Fukuzawa, Yukio Watanabe

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We describe a new method for production of size-controlled Si fine particles that employs a pulsed RF silane discharge. Size, density, and morphology of particles prepared by this method are studied using scanning electron microscopy. Particles with a small size dispersion are produced in the size range from 10 to 120 nm and with densities above 107 cm-3. It is found that particles grow through three phases of nucleation, rapid growth, and growth saturation. Particles in two different size ranges coexist after the initiation of the rapid-growth phase above RF power of 40 W, and coagulation of particles plays a crucial role in the rapid-growth phase.

Original languageEnglish
Pages (from-to)75-78
Number of pages4
JournalSurface Review and Letters
Volume3
Issue number1
DOIs
Publication statusPublished - Jan 1 1996

Fingerprint

Silanes
Coagulation
Nucleation
coagulation
silanes
Scanning electron microscopy
nucleation
saturation
scanning electron microscopy

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Production of size-controlled Si fine particles using pulsed RF discharge. / Shiratani, Masaharu; Kawasaki, H.; Fukuzawa, T.; Watanabe, Yukio.

In: Surface Review and Letters, Vol. 3, No. 1, 01.01.1996, p. 75-78.

Research output: Contribution to journalArticle

@article{e4ef713d72114ca581bf4bf1522f556f,
title = "Production of size-controlled Si fine particles using pulsed RF discharge",
abstract = "We describe a new method for production of size-controlled Si fine particles that employs a pulsed RF silane discharge. Size, density, and morphology of particles prepared by this method are studied using scanning electron microscopy. Particles with a small size dispersion are produced in the size range from 10 to 120 nm and with densities above 107 cm-3. It is found that particles grow through three phases of nucleation, rapid growth, and growth saturation. Particles in two different size ranges coexist after the initiation of the rapid-growth phase above RF power of 40 W, and coagulation of particles plays a crucial role in the rapid-growth phase.",
author = "Masaharu Shiratani and H. Kawasaki and T. Fukuzawa and Yukio Watanabe",
year = "1996",
month = "1",
day = "1",
doi = "10.1142/S0218625X96000176",
language = "English",
volume = "3",
pages = "75--78",
journal = "Surface Review and Letters",
issn = "0218-625X",
publisher = "World Scientific Publishing Co. Pte Ltd",
number = "1",

}

TY - JOUR

T1 - Production of size-controlled Si fine particles using pulsed RF discharge

AU - Shiratani, Masaharu

AU - Kawasaki, H.

AU - Fukuzawa, T.

AU - Watanabe, Yukio

PY - 1996/1/1

Y1 - 1996/1/1

N2 - We describe a new method for production of size-controlled Si fine particles that employs a pulsed RF silane discharge. Size, density, and morphology of particles prepared by this method are studied using scanning electron microscopy. Particles with a small size dispersion are produced in the size range from 10 to 120 nm and with densities above 107 cm-3. It is found that particles grow through three phases of nucleation, rapid growth, and growth saturation. Particles in two different size ranges coexist after the initiation of the rapid-growth phase above RF power of 40 W, and coagulation of particles plays a crucial role in the rapid-growth phase.

AB - We describe a new method for production of size-controlled Si fine particles that employs a pulsed RF silane discharge. Size, density, and morphology of particles prepared by this method are studied using scanning electron microscopy. Particles with a small size dispersion are produced in the size range from 10 to 120 nm and with densities above 107 cm-3. It is found that particles grow through three phases of nucleation, rapid growth, and growth saturation. Particles in two different size ranges coexist after the initiation of the rapid-growth phase above RF power of 40 W, and coagulation of particles plays a crucial role in the rapid-growth phase.

UR - http://www.scopus.com/inward/record.url?scp=0006751683&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0006751683&partnerID=8YFLogxK

U2 - 10.1142/S0218625X96000176

DO - 10.1142/S0218625X96000176

M3 - Article

AN - SCOPUS:0006751683

VL - 3

SP - 75

EP - 78

JO - Surface Review and Letters

JF - Surface Review and Letters

SN - 0218-625X

IS - 1

ER -