Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source

Koji Tamaru, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new metal droplet generator is proposed and tested. In this study, Sn droplets are generated for an laser-produced plasma extreme-ultraviolet light source at 13.5 nm that is used in the next generation optical lithography system. The droplet generator can produce Sn droplets as small as 15 μm on demand.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
PublisherOptical Society of America
ISBN (Print)1424411742, 9781424411740
Publication statusPublished - Jan 1 2007
EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 - Seoul, Korea, Republic of
Duration: Aug 26 2007Aug 26 2007

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
CountryKorea, Republic of
CitySeoul
Period8/26/078/26/07

Fingerprint

Laser produced plasmas
laser plasmas
debris
Debris
Light sources
light sources
generators
ultraviolet radiation
lithography
Gas generators
Photolithography
metals
Metals

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Tamaru, K., Nakamura, D., Takahashi, A., & Okada, T. (2007). Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 (Optics InfoBase Conference Papers). Optical Society of America.

Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. / Tamaru, Koji; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo.

Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007. (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tamaru, K, Nakamura, D, Takahashi, A & Okada, T 2007, Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. in Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optics InfoBase Conference Papers, Optical Society of America, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007, Seoul, Korea, Republic of, 8/26/07.
Tamaru K, Nakamura D, Takahashi A, Okada T. Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America. 2007. (Optics InfoBase Conference Papers).
Tamaru, Koji ; Nakamura, Daisuke ; Takahashi, Akihiko ; Okada, Tatsuo. / Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007. (Optics InfoBase Conference Papers).
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