Progress and perspective of optical MEMS packaging technology

Renshi Sawada, Hirofumi Nogami, Eiji Higurashi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)558-566
Number of pages9
JournalJournal of Japan Institute of Electronics Packaging
Volume21
Issue number6
DOIs
Publication statusPublished - Sep 1 2018

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MOEMS
Packaging

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Progress and perspective of optical MEMS packaging technology. / Sawada, Renshi; Nogami, Hirofumi; Higurashi, Eiji.

In: Journal of Japan Institute of Electronics Packaging, Vol. 21, No. 6, 01.09.2018, p. 558-566.

Research output: Contribution to journalArticle

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