Progress and perspective of optical MEMS packaging technology

Renshi Sawada; Hirofumi Nogami; Eiji Higurashi

doi:10.5104/jiep.21.558

Progress and perspective of optical MEMS packaging technology

Renshi Sawada, Hirofumi Nogami, Eiji Higurashi

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	558-566
Number of pages	9
Journal	Journal of Japan Institute of Electronics Packaging
Volume	21
Issue number	6
DOIs	https://doi.org/10.5104/jiep.21.558
Publication status	Published - Sept 2018

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

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title = "Progress and perspective of optical MEMS packaging technology",

author = "Renshi Sawada and Hirofumi Nogami and Eiji Higurashi",

year = "2018",

month = sep,

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volume = "21",

pages = "558--566",

journal = "Journal of Japan Institute of Electronics Packaging",

issn = "1343-9677",

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Progress and perspective of optical MEMS packaging technology

All Science Journal Classification (ASJC) codes

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