Progress and perspectives in dry processes for leading-edge manufacturing of devices: Toward intelligent processes and virtual product development

Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

Research output: Contribution to journalReview article

1 Citation (Scopus)

Abstract

Semiconductor device production has grown year on year, with high-volume manufacturing supported by advances in plasma processes. In plasma-based processing, ions and reactive species synergistically enhance chemical reactions, whose kinetics is in a nonequilibrium state in the region of the surface subjected to ion bombardment. To control such processing, methods for process monitoring, equipment control, modeling and simulation, and controlling plasma-induced damage, are required. Here, we conduct a systematic review of the literature over the last 40 years to evaluate the history and progress of dry processes in regard to intelligent process-control. We also address the challenges of implementing "virtual product development" utilizing information technology.

Original languageEnglish
Article numberSE0804
JournalJapanese journal of applied physics
Volume58
Issue numberSE
DOIs
Publication statusPublished - 2019

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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    Iwase, T., Kamaji, Y., Kang, S. Y., Koga, K., Kuboi, N., Nakamura, M., Negishi, N., Nozaki, T., Nunomura, S., Ogawa, D., Omura, M., Shimizu, T., Shinoda, K., Sonoda, Y., Suzuki, H., Takahashi, K., Tsutsumi, T., Yoshikawa, K., Ishijima, T., & Ishikawa, K. (2019). Progress and perspectives in dry processes for leading-edge manufacturing of devices: Toward intelligent processes and virtual product development. Japanese journal of applied physics, 58(SE), [SE0804]. https://doi.org/10.7567/1347-4065/ab163b