Progress with MEMS X-ray micro pore optics

Yuichiro Ezoea, Teppei Moriyama, Tomohiro Ogawa, Takuya Kakiuchi, Takaya Ohashi, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Mitsuhiro Horade, Susumu Sugiyama, Raul E. Riveros, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.

Original languageEnglish
Title of host publicationSpace Telescopes and Instrumentation 2012
Subtitle of host publicationUltraviolet to Gamma Ray
DOIs
Publication statusPublished - Dec 1 2012
EventSpace Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray - Amsterdam, Netherlands
Duration: Jul 1 2012Jul 6 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8443
ISSN (Print)0277-786X

Other

OtherSpace Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray
CountryNetherlands
CityAmsterdam
Period7/1/127/6/12

Fingerprint

Micro-electro-mechanical Systems
Wafer
Optics
wafers
optics
porosity
Telescopes
X rays
X ray lithography
Telescope
Dry etching
x rays
Atomic layer deposition
Electroplating
telescopes
X-ray Mirror
Heavy Metals
High Angular Resolution
Heavy metals
Radius of curvature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Ezoea, Y., Moriyama, T., Ogawa, T., Kakiuchi, T., Ohashi, T., Mitsuishi, I., ... Maeda, R. (2012). Progress with MEMS X-ray micro pore optics. In Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray [84430U] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8443). https://doi.org/10.1117/12.925811

Progress with MEMS X-ray micro pore optics. / Ezoea, Yuichiro; Moriyama, Teppei; Ogawa, Tomohiro; Kakiuchi, Takuya; Ohashi, Takaya; Mitsuishi, Ikuyuki; Mitsuda, Kazuhisa; Horade, Mitsuhiro; Sugiyama, Susumu; Riveros, Raul E.; Yamaguchi, Hitomi; Kanamori, Yoshiaki; Morishita, Kohei; Nakajima, Kazuo; Maeda, Ryutaro.

Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray. 2012. 84430U (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8443).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ezoea, Y, Moriyama, T, Ogawa, T, Kakiuchi, T, Ohashi, T, Mitsuishi, I, Mitsuda, K, Horade, M, Sugiyama, S, Riveros, RE, Yamaguchi, H, Kanamori, Y, Morishita, K, Nakajima, K & Maeda, R 2012, Progress with MEMS X-ray micro pore optics. in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray., 84430U, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8443, Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, Amsterdam, Netherlands, 7/1/12. https://doi.org/10.1117/12.925811
Ezoea Y, Moriyama T, Ogawa T, Kakiuchi T, Ohashi T, Mitsuishi I et al. Progress with MEMS X-ray micro pore optics. In Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray. 2012. 84430U. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.925811
Ezoea, Yuichiro ; Moriyama, Teppei ; Ogawa, Tomohiro ; Kakiuchi, Takuya ; Ohashi, Takaya ; Mitsuishi, Ikuyuki ; Mitsuda, Kazuhisa ; Horade, Mitsuhiro ; Sugiyama, Susumu ; Riveros, Raul E. ; Yamaguchi, Hitomi ; Kanamori, Yoshiaki ; Morishita, Kohei ; Nakajima, Kazuo ; Maeda, Ryutaro. / Progress with MEMS X-ray micro pore optics. Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray. 2012. (Proceedings of SPIE - The International Society for Optical Engineering).
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