TY - JOUR
T1 - Properties of metal doped tungsten oxide thin films for NOx gas sensors grown by PLD method combined with sputtering process
AU - Kawasaki, Hiroharu
AU - Ueda, Tsuyoshi
AU - Suda, Yoshiaki
AU - Ohshima, Tamiko
N1 - Funding Information:
This work was supported in part by the Grant-in-Aid for Young Scientists (A), Grant-in-Aid for Scientific Research (B) and a Research Fund from Nagasaki Super Technology Development Association. The authors wish to thank Drs. K. Ebihara and T. Ikegami of Kumamoto University for their helpful discussions. The authors also wish to thank Dr. H. Abe and Mr. H. Yoshida of the Ceramic Research Center of Nagasaki for their technical assistance with the experimental data.
PY - 2004/6/1
Y1 - 2004/6/1
N2 - The gas sensors based on tungsten oxide (WO3) thin films and doped with different amount of gold (Au) or palladium (Pd) were synthesized by a new developed preparation system using the pulsed Nd:YAG (532 nm) laser deposition method combined with dc sputtering. The crystalline structure and crystallographic orientation of the prepared Au doped WO3 (WO 3-Au) thin films, measured by X-ray diffraction system, suggested that there were distinct peaks of WO3 (0 0 1) and (2 0 1) and weak peaks of WO3 (1 2 0), (1 1 1), (0 0 2) and (1 1 2). The maximum sensitivity for 200ppm NO2 were approximately 69 for WO 3-Au thin film and 24 for WO3-Pd thin film at the operating temperature of 300°C, respectively. These maximum sensitivities are higher than that of the non-doped WO3 sensor which sensitivity is about 17. This may be due to its electronic and/or chemical sensitization effect.
AB - The gas sensors based on tungsten oxide (WO3) thin films and doped with different amount of gold (Au) or palladium (Pd) were synthesized by a new developed preparation system using the pulsed Nd:YAG (532 nm) laser deposition method combined with dc sputtering. The crystalline structure and crystallographic orientation of the prepared Au doped WO3 (WO 3-Au) thin films, measured by X-ray diffraction system, suggested that there were distinct peaks of WO3 (0 0 1) and (2 0 1) and weak peaks of WO3 (1 2 0), (1 1 1), (0 0 2) and (1 1 2). The maximum sensitivity for 200ppm NO2 were approximately 69 for WO 3-Au thin film and 24 for WO3-Pd thin film at the operating temperature of 300°C, respectively. These maximum sensitivities are higher than that of the non-doped WO3 sensor which sensitivity is about 17. This may be due to its electronic and/or chemical sensitization effect.
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U2 - 10.1016/j.snb.2003.12.052
DO - 10.1016/j.snb.2003.12.052
M3 - Conference article
AN - SCOPUS:2342479792
VL - 100
SP - 266
EP - 269
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
IS - 1-2
T2 - New Materials and Technologies in Sensor Applications, Proceedings
Y2 - 10 June 2003 through 13 June 2003
ER -