Properties of various plasma surface treatments for low-temperature Au-Au bonding

Michitaka Yamamoto, Eiji Higurashi, Tadatomo Suga, Renshi Sawada, Toshihiro Itoh

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Atmospheric-pressure (AP) plasma treatment using three different types of gases (an argon-hydrogen mixed gas, an argon-oxygen mixed gas, and a nitrogen gas) and low-pressure (LP) plasma treatment using an argon gas were compared for Au-Au bonding with thin films and stud bumps at low temperature (25 or 150 °C) in ambient air. The argon-hydrogen gas mixture AP plasma treatment and argon LP plasma treatment were found to distinctly increase the shear bond strength for both samples at both temperatures. From X-ray photoelectron spectroscopy (XPS) analysis, the removal of organic contaminants on Au surfaces without the formation of hydroxyl groups and gold oxide is considered effective in increasing the Au-Au bonding strength at low temperature.

Original languageEnglish
Article number04FC12
JournalJapanese Journal of Applied Physics
Volume57
Issue number4
DOIs
Publication statusPublished - Apr 1 2018

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surface treatment
Surface treatment
Argon
argon
Plasmas
Gases
gases
Atmospheric pressure
atmospheric pressure
Temperature
low pressure
Hydrogen
hydrogen
Gas mixtures
gas pressure
contaminants
gas mixtures
X ray photoelectron spectroscopy
Gold
photoelectron spectroscopy

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Properties of various plasma surface treatments for low-temperature Au-Au bonding. / Yamamoto, Michitaka; Higurashi, Eiji; Suga, Tadatomo; Sawada, Renshi; Itoh, Toshihiro.

In: Japanese Journal of Applied Physics, Vol. 57, No. 4, 04FC12, 01.04.2018.

Research output: Contribution to journalArticle

Yamamoto, Michitaka ; Higurashi, Eiji ; Suga, Tadatomo ; Sawada, Renshi ; Itoh, Toshihiro. / Properties of various plasma surface treatments for low-temperature Au-Au bonding. In: Japanese Journal of Applied Physics. 2018 ; Vol. 57, No. 4.
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