Proposal of cleanliness evaluation method of CMP pad, and investigation of cleaning effect by the high-pressure jet

Masashi Kitamura, Syuhei Kurokawa, Yuta Tokumoto, Terutake Hayashi, Hirokuni Hiyama, Yutaka Wada, Chikako Takatoh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Proposal of cleanliness evaluation method of CMP pad, and investigation of cleaning effect by the high-pressure jet'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science