Prototype of the multi-pixel X-ray microcalorimeter

H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, H. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N. Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. FujimoriY. Ishisaki, U. Morita, T. Koga, K. Sato, T. Ohashi, Y. Kuroda, M. Onishi, K. Otake

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1108-1111
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - Jan 1 2003
Externally publishedYes
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Fingerprint

Pixels
X rays
X ray spectrometers
Full width at half maximum
Electrodeposition
Photons
Imaging techniques

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Kudo, H., Nakamura, T., Arakawa, T., Ohtsuka, S., Izumi, T., Shoji, S., ... Otake, K. (2003). Prototype of the multi-pixel X-ray microcalorimeter. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1108-1111). [1216963] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216963

Prototype of the multi-pixel X-ray microcalorimeter. / Kudo, H.; Nakamura, T.; Arakawa, T.; Ohtsuka, S.; Izumi, T.; Shoji, S.; Sato, H.; Kobayashi, H.; Mori, K.; Homma, T.; Osaka, T.; Mitsuda, K.; Yamasaki, N. Y.; Fujimoto, R.; Iyomoto, N.; Oshima, T.; Futamoto, K.; Takei, Y.; Ichitsubo, T.; Fujimori, T.; Ishisaki, Y.; Morita, U.; Koga, T.; Sato, K.; Ohashi, T.; Kuroda, Y.; Onishi, M.; Otake, K.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1108-1111 1216963 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kudo, H, Nakamura, T, Arakawa, T, Ohtsuka, S, Izumi, T, Shoji, S, Sato, H, Kobayashi, H, Mori, K, Homma, T, Osaka, T, Mitsuda, K, Yamasaki, NY, Fujimoto, R, Iyomoto, N, Oshima, T, Futamoto, K, Takei, Y, Ichitsubo, T, Fujimori, T, Ishisaki, Y, Morita, U, Koga, T, Sato, K, Ohashi, T, Kuroda, Y, Onishi, M & Otake, K 2003, Prototype of the multi-pixel X-ray microcalorimeter. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1216963, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1108-1111, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1216963
Kudo H, Nakamura T, Arakawa T, Ohtsuka S, Izumi T, Shoji S et al. Prototype of the multi-pixel X-ray microcalorimeter. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1108-1111. 1216963. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). https://doi.org/10.1109/SENSOR.2003.1216963
Kudo, H. ; Nakamura, T. ; Arakawa, T. ; Ohtsuka, S. ; Izumi, T. ; Shoji, S. ; Sato, H. ; Kobayashi, H. ; Mori, K. ; Homma, T. ; Osaka, T. ; Mitsuda, K. ; Yamasaki, N. Y. ; Fujimoto, R. ; Iyomoto, N. ; Oshima, T. ; Futamoto, K. ; Takei, Y. ; Ichitsubo, T. ; Fujimori, T. ; Ishisaki, Y. ; Morita, U. ; Koga, T. ; Sato, K. ; Ohashi, T. ; Kuroda, Y. ; Onishi, M. ; Otake, K. / Prototype of the multi-pixel X-ray microcalorimeter. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1108-1111 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).
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AU - Shoji, S.

AU - Sato, H.

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AU - Fujimori, T.

AU - Ishisaki, Y.

AU - Morita, U.

AU - Koga, T.

AU - Sato, K.

AU - Ohashi, T.

AU - Kuroda, Y.

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