Pulsed laser irradiation as a process of conductive surface formation on nanopolycrystalline diamond

Rei Fukuta, Naoya Yamamoto, Fumitaro Ishikawa, Masafumi Matsushita, Tsuyoshi Yoshitake, Hiroshi Ikenoue, Hiroaki Ohfuji, Toru Shinmei, Tetsuo Irifune

Research output: Contribution to journalArticle

Abstract

We propose a simple and easy electrode formation technique on nanopolycrystalline diamond (NPD) synthesized by a high-temperature and high-pressure technique. The stronger light absorption nature of NPD than of standard transparent diamond enables the laser irradiation process on NPD. Pulsed laser irradiation using an ArF excimer laser under atmospheric condition drastically reduced the resistance of the NPD surface by forming graphite. Repetition of the laser irradiation reduced the resistance, showing a resistance of 300 Ω for the laser-irradiated area of 100 × 150 μm2. These results indicate the applicability of pulsed laser irradiation to an NPD apparatus having a conductive electrode, as well as electronic device processes.

Original languageEnglish
Article number118004
JournalJapanese journal of applied physics
Volume57
Issue number11
DOIs
Publication statusPublished - Nov 2018

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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