Rapid transport of nano-particles in amplitude modulated rf discharges for depositing porous ultra-low-k films

S. Iwashita, M. Morita, K. Koga, M. Shiratani

Research output: Contribution to journalConference articlepeer-review

Fingerprint

Dive into the research topics of 'Rapid transport of nano-particles in amplitude modulated rf discharges for depositing porous ultra-low-k films'. Together they form a unique fingerprint.

Physics & Astronomy