Reactive-fast-atom beam etching of GaAs using Cl2 gas

Fusao Shimokawa, Hidenao Tanaka, Yuji Uenishi, Renshi Sawada

Research output: Contribution to journalArticlepeer-review

58 Citations (Scopus)

Fingerprint Dive into the research topics of 'Reactive-fast-atom beam etching of GaAs using Cl2 gas'. Together they form a unique fingerprint.

Physics & Astronomy