Realization of an ultra-flat silica surface with angstrom-scale average roughness using nanophotonic polishing

T. Yatsui, Wataru Nomura, M. Ohtsu, K. Hirata, Y. Tabata

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    We report that nanophotonic polishing of a silica substrate using a nonadiabatic photochemical reaction drastically reduced the average surface roughness, Ra, and the dispersion of Ra.

    Original languageEnglish
    Title of host publication2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
    DOIs
    Publication statusPublished - Sep 15 2008
    EventConference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008 - San Jose, CA, United States
    Duration: May 4 2008May 9 2008

    Publication series

    Name2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS

    Other

    OtherConference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008
    CountryUnited States
    CitySan Jose, CA
    Period5/4/085/9/08

    All Science Journal Classification (ASJC) codes

    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

    Fingerprint Dive into the research topics of 'Realization of an ultra-flat silica surface with angstrom-scale average roughness using nanophotonic polishing'. Together they form a unique fingerprint.

  • Cite this

    Yatsui, T., Nomura, W., Ohtsu, M., Hirata, K., & Tabata, Y. (2008). Realization of an ultra-flat silica surface with angstrom-scale average roughness using nanophotonic polishing. In 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS [4551310] (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS). https://doi.org/10.1109/CLEO.2008.4551310