Reduction of electron temperature in rf plasma using magnetic filter

Nobuya Hayashi, Toshio Nakashima, Hiroharu Fujita

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

The radio frequency (rf) plasma was adopted to reduce electron temperature, using a magnetic filter. Detection of electron energy distribution functions with a grid analyzer facing the plasma source and the magnetic filter revealed that only the low energy electrons passed through the magnetic filter and the high energy electrons were reflected by the filter. A reduction of the rf oscillating potential was also observed after passing through the filter, using a novel method with an emissive probe. The reduction rate, expressed as a function of the ion hole parameter around the magnetic filter, was found to be described by a fixed curve for various ion species and neutral gas pressures.

Original languageEnglish
Pages (from-to)4301-4304
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number7 B
DOIs
Publication statusPublished - Jul 1999
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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