Abstract
The radio frequency (rf) plasma was adopted to reduce electron temperature, using a magnetic filter. Detection of electron energy distribution functions with a grid analyzer facing the plasma source and the magnetic filter revealed that only the low energy electrons passed through the magnetic filter and the high energy electrons were reflected by the filter. A reduction of the rf oscillating potential was also observed after passing through the filter, using a novel method with an emissive probe. The reduction rate, expressed as a function of the ion hole parameter around the magnetic filter, was found to be described by a fixed curve for various ion species and neutral gas pressures.
| Original language | English |
|---|---|
| Pages (from-to) | 4301-4304 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 38 |
| Issue number | 7 B |
| Publication status | Published - Jul 1 1999 |
| Externally published | Yes |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)
Cite this
Reduction of electron temperature in rf plasma using magnetic filter. / Hayashi, Nobuya; Nakashima, Toshio; Fujita, Hiroharu.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 38, No. 7 B, 01.07.1999, p. 4301-4304.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Reduction of electron temperature in rf plasma using magnetic filter
AU - Hayashi, Nobuya
AU - Nakashima, Toshio
AU - Fujita, Hiroharu
PY - 1999/7/1
Y1 - 1999/7/1
N2 - The radio frequency (rf) plasma was adopted to reduce electron temperature, using a magnetic filter. Detection of electron energy distribution functions with a grid analyzer facing the plasma source and the magnetic filter revealed that only the low energy electrons passed through the magnetic filter and the high energy electrons were reflected by the filter. A reduction of the rf oscillating potential was also observed after passing through the filter, using a novel method with an emissive probe. The reduction rate, expressed as a function of the ion hole parameter around the magnetic filter, was found to be described by a fixed curve for various ion species and neutral gas pressures.
AB - The radio frequency (rf) plasma was adopted to reduce electron temperature, using a magnetic filter. Detection of electron energy distribution functions with a grid analyzer facing the plasma source and the magnetic filter revealed that only the low energy electrons passed through the magnetic filter and the high energy electrons were reflected by the filter. A reduction of the rf oscillating potential was also observed after passing through the filter, using a novel method with an emissive probe. The reduction rate, expressed as a function of the ion hole parameter around the magnetic filter, was found to be described by a fixed curve for various ion species and neutral gas pressures.
UR - http://www.scopus.com/inward/record.url?scp=0033157766&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0033157766&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0033157766
VL - 38
SP - 4301
EP - 4304
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 B
ER -