Reflective optics for sub-10nm hard X-ray focusing

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, Takashi Kimura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

Nanofocused X-rays are indispensable because they can provide high spatial resolution and high sensitivity for X-ray nanoscopy/spectroscopy. A focusing system with reflective optics is one of the most promising methods for producing nanofocused X-rays due to its high efficiency and beams size. So, far we realize efficient hard X-ray focusing with a beam size of 25nm. Our next project is realization of sub-10nm hard X-ray focusing. Here, we describe the design of the graded multilayer mirror and evaluation method for hard X-ray focused beam.

Original languageEnglish
Article number67050L
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume6705
DOIs
Publication statusPublished - Dec 1 2007
Externally publishedYes
EventAdvances in X-Ray/EUV Optics and Components II - San Diego, CA, United States
Duration: Aug 27 2007Aug 28 2007

Fingerprint

Hard X-ray
Optics
optics
X rays
x rays
X-ray Spectroscopy
Evaluation Method
Spatial Resolution
High Efficiency
Multilayer
Mirror
High Resolution
X ray spectroscopy
Multilayers
Mirrors
spatial resolution
mirrors
evaluation
sensitivity
high resolution

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Reflective optics for sub-10nm hard X-ray focusing. / Mimura, H.; Matsuyama, S.; Yumoto, H.; Handa, S.; Kimura, Takashi; Sano, Y.; Tamasaku, K.; Nishino, Y.; Yabashi, M.; Ishikawa, T.; Yamauchi, K.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 6705, 67050L, 01.12.2007.

Research output: Contribution to journalConference article

Mimura, H, Matsuyama, S, Yumoto, H, Handa, S, Kimura, T, Sano, Y, Tamasaku, K, Nishino, Y, Yabashi, M, Ishikawa, T & Yamauchi, K 2007, 'Reflective optics for sub-10nm hard X-ray focusing', Proceedings of SPIE - The International Society for Optical Engineering, vol. 6705, 67050L. https://doi.org/10.1117/12.734752
Mimura, H. ; Matsuyama, S. ; Yumoto, H. ; Handa, S. ; Kimura, Takashi ; Sano, Y. ; Tamasaku, K. ; Nishino, Y. ; Yabashi, M. ; Ishikawa, T. ; Yamauchi, K. / Reflective optics for sub-10nm hard X-ray focusing. In: Proceedings of SPIE - The International Society for Optical Engineering. 2007 ; Vol. 6705.
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