Reflective optics for sub-10nm hard X-ray focusing

H. Mimura; S. Matsuyama; H. Yumoto; S. Handa; Takashi Kimura; Y. Sano; K. Tamasaku; Y. Nishino; M. Yabashi; T. Ishikawa; K. Yamauchi

doi:10.1117/12.734752

Reflective optics for sub-10nm hard X-ray focusing

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, Takashi Kimura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi

Research output: Contribution to journal › Conference article › peer-review

5 Citations (Scopus)

Abstract

Nanofocused X-rays are indispensable because they can provide high spatial resolution and high sensitivity for X-ray nanoscopy/spectroscopy. A focusing system with reflective optics is one of the most promising methods for producing nanofocused X-rays due to its high efficiency and beams size. So, far we realize efficient hard X-ray focusing with a beam size of 25nm. Our next project is realization of sub-10nm hard X-ray focusing. Here, we describe the design of the graded multilayer mirror and evaluation method for hard X-ray focused beam.

Original language	English
Article number	67050L
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6705
DOIs	https://doi.org/10.1117/12.734752
Publication status	Published - Dec 1 2007
Externally published	Yes
Event	Advances in X-Ray/EUV Optics and Components II - San Diego, CA, United States Duration: Aug 27 2007 → Aug 28 2007

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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Reflective optics for sub-10nm hard X-ray focusing. / Mimura, H.; Matsuyama, S.; Yumoto, H.; Handa, S.; Kimura, Takashi; Sano, Y.; Tamasaku, K.; Nishino, Y.; Yabashi, M.; Ishikawa, T.; Yamauchi, K.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 6705, 67050L, 01.12.2007.

Research output: Contribution to journal › Conference article › peer-review

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AU - Mimura, H.

AU - Matsuyama, S.

AU - Yumoto, H.

AU - Handa, S.

AU - Kimura, Takashi

AU - Sano, Y.

AU - Tamasaku, K.

AU - Nishino, Y.

AU - Yabashi, M.

AU - Ishikawa, T.

AU - Yamauchi, K.

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