Abstract
Nanofocused X-rays are indispensable because they can provide high spatial resolution and high sensitivity for X-ray nanoscopy/spectroscopy. A focusing system with reflective optics is one of the most promising methods for producing nanofocused X-rays due to its high efficiency and beams size. So, far we realize efficient hard X-ray focusing with a beam size of 25nm. Our next project is realization of sub-10nm hard X-ray focusing. Here, we describe the design of the graded multilayer mirror and evaluation method for hard X-ray focused beam.
| Original language | English |
|---|---|
| Article number | 67050L |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 6705 |
| DOIs | |
| Publication status | Published - Dec 1 2007 |
| Externally published | Yes |
| Event | Advances in X-Ray/EUV Optics and Components II - San Diego, CA, United States Duration: Aug 27 2007 → Aug 28 2007 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Cite this
Reflective optics for sub-10nm hard X-ray focusing. / Mimura, H.; Matsuyama, S.; Yumoto, H.; Handa, S.; Kimura, Takashi; Sano, Y.; Tamasaku, K.; Nishino, Y.; Yabashi, M.; Ishikawa, T.; Yamauchi, K.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 6705, 67050L, 01.12.2007.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - Reflective optics for sub-10nm hard X-ray focusing
AU - Mimura, H.
AU - Matsuyama, S.
AU - Yumoto, H.
AU - Handa, S.
AU - Kimura, Takashi
AU - Sano, Y.
AU - Tamasaku, K.
AU - Nishino, Y.
AU - Yabashi, M.
AU - Ishikawa, T.
AU - Yamauchi, K.
PY - 2007/12/1
Y1 - 2007/12/1
N2 - Nanofocused X-rays are indispensable because they can provide high spatial resolution and high sensitivity for X-ray nanoscopy/spectroscopy. A focusing system with reflective optics is one of the most promising methods for producing nanofocused X-rays due to its high efficiency and beams size. So, far we realize efficient hard X-ray focusing with a beam size of 25nm. Our next project is realization of sub-10nm hard X-ray focusing. Here, we describe the design of the graded multilayer mirror and evaluation method for hard X-ray focused beam.
AB - Nanofocused X-rays are indispensable because they can provide high spatial resolution and high sensitivity for X-ray nanoscopy/spectroscopy. A focusing system with reflective optics is one of the most promising methods for producing nanofocused X-rays due to its high efficiency and beams size. So, far we realize efficient hard X-ray focusing with a beam size of 25nm. Our next project is realization of sub-10nm hard X-ray focusing. Here, we describe the design of the graded multilayer mirror and evaluation method for hard X-ray focused beam.
UR - http://www.scopus.com/inward/record.url?scp=42149181396&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=42149181396&partnerID=8YFLogxK
U2 - 10.1117/12.734752
DO - 10.1117/12.734752
M3 - Conference article
AN - SCOPUS:42149181396
VL - 6705
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
SN - 0277-786X
M1 - 67050L
ER -