Relationship between aluminum and lithium and annealing for reducing lithium contamination in aluminum-implanted zinc oxide

Isao Sakaguchi, Kenji Matsumoto, Takeshi Ohgaki, Shunichi Hishita, Yutaka Adachi, Tsubasa Nakagawa, Ken Watanabe, Naoki Ohashi, Hajime Haneda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The relationship between Al and Li during diffusion was studied using Al-implanted ZnO. The Al donor in ZnO acts to increase the concentration of Li contamination from the atmosphere during the annealing. It is difficult to decompose the relationship formed by diffusion between Al and Li during high-temperature annealing. The most effective method to decompose the relationship is to anneal the as-implanted ZnO at a pressure of 5×10 -3 torr. This annealing increases the Al solubility limit because the ZnO surface evaporates.

Original languageEnglish
Title of host publicationElectroceramics in Japan XIII
Pages205-208
Number of pages4
DOIs
Publication statusPublished - Dec 29 2010
Externally publishedYes
Event9th Electronics Division Meeting of the Ceramic Society of Japan - Tokyo, Japan
Duration: Oct 23 2009Oct 24 2009

Publication series

NameKey Engineering Materials
Volume445
ISSN (Print)1013-9826

Other

Other9th Electronics Division Meeting of the Ceramic Society of Japan
CountryJapan
CityTokyo
Period10/23/0910/24/09

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Sakaguchi, I., Matsumoto, K., Ohgaki, T., Hishita, S., Adachi, Y., Nakagawa, T., ... Haneda, H. (2010). Relationship between aluminum and lithium and annealing for reducing lithium contamination in aluminum-implanted zinc oxide. In Electroceramics in Japan XIII (pp. 205-208). (Key Engineering Materials; Vol. 445). https://doi.org/10.4028/www.scientific.net/KEM.445.205