@inproceedings{6d5199c94f7b47dab7af2b9cb6cfc276,
title = "Relationship between aluminum and lithium and annealing for reducing lithium contamination in aluminum-implanted zinc oxide",
abstract = "The relationship between Al and Li during diffusion was studied using Al-implanted ZnO. The Al donor in ZnO acts to increase the concentration of Li contamination from the atmosphere during the annealing. It is difficult to decompose the relationship formed by diffusion between Al and Li during high-temperature annealing. The most effective method to decompose the relationship is to anneal the as-implanted ZnO at a pressure of 5×10 -3 torr. This annealing increases the Al solubility limit because the ZnO surface evaporates.",
author = "Isao Sakaguchi and Kenji Matsumoto and Takeshi Ohgaki and Shunichi Hishita and Yutaka Adachi and Tsubasa Nakagawa and Ken Watanabe and Naoki Ohashi and Hajime Haneda",
note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",
year = "2010",
doi = "10.4028/www.scientific.net/KEM.445.205",
language = "English",
isbn = "9780878492640",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "205--208",
booktitle = "Electroceramics in Japan XIII",
}