Relationship between aluminum and lithium and annealing for reducing lithium contamination in aluminum-implanted zinc oxide

Isao Sakaguchi, Kenji Matsumoto, Takeshi Ohgaki, Shunichi Hishita, Yutaka Adachi, Tsubasa Nakagawa, Ken Watanabe, Naoki Ohashi, Hajime Haneda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The relationship between Al and Li during diffusion was studied using Al-implanted ZnO. The Al donor in ZnO acts to increase the concentration of Li contamination from the atmosphere during the annealing. It is difficult to decompose the relationship formed by diffusion between Al and Li during high-temperature annealing. The most effective method to decompose the relationship is to anneal the as-implanted ZnO at a pressure of 5×10 -3 torr. This annealing increases the Al solubility limit because the ZnO surface evaporates.

Original languageEnglish
Title of host publicationElectroceramics in Japan XIII
PublisherTrans Tech Publications Ltd
Pages205-208
Number of pages4
ISBN (Print)9780878492640
DOIs
Publication statusPublished - 2010
Externally publishedYes

Publication series

NameKey Engineering Materials
Volume445
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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