Relationship between dislocation density and oxygen concentration in silicon crystals during directional solidification

Tomoro Ide, Hirofumi Harada, Yoshiji Miyamura, Masato Imai, Satoshi Nakano, Koichi Kakimoto

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper reports the relationship between oxygen concentration and dislocation multiplication in silicon crystals during directional solidification using numerical analysis. Based on the Alexander–Haasen–Sumino model, this analysis involved oxygen diffusion from the bulk to dislocation cores during crystal growth and annealing processes in a furnace. The results showed that the dislocation density mainly increased during cooling process, rather than crystal growth, when the effect of oxygen diffusion to dislocation cores was ignored. On the contrary, the dislocation density increased during both crystal growth and cooling processes when the effect of interstitial oxygen diffusion was considered. At a dislocation density larger than 1.0 × 105 cm–2, the interstitial oxygen concentration in bulk decreased due to the diffusion process, if interstitial oxygen atoms were between dislocations, whereas the concentration at dislocation cores increases.

Original languageEnglish
Article number244
JournalCrystals
Volume8
Issue number6
DOIs
Publication statusPublished - Jun 7 2018

Fingerprint

Silicon
Dislocations (crystals)
Solidification
Oxygen
Crystals
silicon
oxygen
Crystallization
Crystal growth
crystal growth
interstitials
Cooling
cooling
Numerical analysis
Furnaces
multiplication
Annealing
numerical analysis
furnaces
oxygen atoms

All Science Journal Classification (ASJC) codes

  • Chemical Engineering(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Inorganic Chemistry

Cite this

Relationship between dislocation density and oxygen concentration in silicon crystals during directional solidification. / Ide, Tomoro; Harada, Hirofumi; Miyamura, Yoshiji; Imai, Masato; Nakano, Satoshi; Kakimoto, Koichi.

In: Crystals, Vol. 8, No. 6, 244, 07.06.2018.

Research output: Contribution to journalArticle

Ide, Tomoro ; Harada, Hirofumi ; Miyamura, Yoshiji ; Imai, Masato ; Nakano, Satoshi ; Kakimoto, Koichi. / Relationship between dislocation density and oxygen concentration in silicon crystals during directional solidification. In: Crystals. 2018 ; Vol. 8, No. 6.
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