Abstract
In this study, evaluation of precision in rotation stage and investigation of effect of rotation stage blurring on resolution are performed in imaging X-ray tomography set-up, which allows nano-scale observation, for the purpose of improving resolution in X-ray tomography. In the result of precision evaluation of rotation stage in high-resolution imaging X-ray tomography, fluctuation, which was approximately 35 nm in maximum and approximately 13 nm in average, was found. This fluctuation was under 1 pixel. In the simulation that analyzed effect of fluctuation in rotation stage, it was found that long periodic fluctuation deteriorate reconstructed image terribly. But, impulse-like fluctuation does not almost affect reconstructed image quality. However, reconstructed image is deteriorated when the frequency of impulse-like fluctuation increase. If long periodic fluctuation, which was observed in the precision evaluation, is corrected, the resolution improvement was confirmed though the fluctuation was less than 1 pixel.
| Original language | English |
|---|---|
| Pages (from-to) | 273-278 |
| Number of pages | 6 |
| Journal | Keikinzoku/Journal of Japan Institute of Light Metals |
| Volume | 63 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - 2013 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Metals and Alloys
- Materials Chemistry