Repairing nanoscale scratched grooves on polycrystalline ceramics using optical near-field assisted sputtering

W. Nomura, T. Yatsui, Y. Yanase, K. Suzuki, M. Fujita, A. Kamata, M. Naruse, M. Ohtsu

    Research output: Contribution to journalArticle

    10 Citations (Scopus)

    Abstract

    We propose an optical near-field assisted sputtering method for repairing scratches on the surface of polycrystalline ceramics in a self-assembling manner. An Al2O3 source was sputtered on substrates with laser radiation of wavelength 473 nm. The average depth of the scratched grooves on polycrystalline Al2O3 ceramic substrate decreased from 3.2 nm to 0.79 nm. Using a Hough transform, we also confirmed the selective repair of scratches.

    Original languageEnglish
    Pages (from-to)75-78
    Number of pages4
    JournalApplied Physics B: Lasers and Optics
    Volume99
    Issue number1-2
    DOIs
    Publication statusPublished - Apr 1 2010

    All Science Journal Classification (ASJC) codes

    • Physics and Astronomy (miscellaneous)
    • Physics and Astronomy(all)

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