Research on cleaning efficiency of high pressure micro jet - A study through analysis of particles' movement and experiment on cleaning

Keiji Miyachi, Syuhei Kurokawa, Yoshiyuki Seike, Hiroyuki Yamamoto, Yoshinori Kobayashi, Toshiro Doi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

High pressure micro jet is often used for single-substrate cleaning processing of electronic devices, but its cleaning mechanism has not been fully clarified yet. In this study, while sizes and velocity of fine cleaning liquid droplets sprayed out of the high pressure micro jet system are measured using Shadow Doppler Particle Analyzer, experiments are carried out to see cleaning efficiency for true spherical particles of polystyrene latex stuck on glass substrates. As a result, it is found that cleaning efficiency of high pressure micro jet system is highly correlative with velocity of cleaning liquid particles, where radiant flow by collision of cleaning particles has a profound effect.

Original languageEnglish
Pages (from-to)1074-1079
Number of pages6
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume74
Issue number10
DOIs
Publication statusPublished - Jan 1 2008
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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