Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines

M. Nakano, S. Sato, F. Yamashita, T. Honda, J. Yamasaki, K. Ishiyama, Masaru Itakura, J. Fidler, T. Yanai, H. Fukunaga

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28 Citations (Scopus)

Abstract

Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.

Original languageEnglish
Pages (from-to)2672-2676
Number of pages5
JournalIEEE Transactions on Magnetics
Volume43
Issue number6
DOIs
Publication statusPublished - Jun 1 2007

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Nakano, M., Sato, S., Yamashita, F., Honda, T., Yamasaki, J., Ishiyama, K., Itakura, M., Fidler, J., Yanai, T., & Fukunaga, H. (2007). Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines. IEEE Transactions on Magnetics, 43(6), 2672-2676. https://doi.org/10.1109/TMAG.2007.893778