TY - JOUR
T1 - Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines
AU - Nakano, M.
AU - Sato, S.
AU - Yamashita, F.
AU - Honda, T.
AU - Yamasaki, J.
AU - Ishiyama, K.
AU - Itakura, M.
AU - Fidler, J.
AU - Yanai, T.
AU - Fukunaga, H.
N1 - Funding Information:
This work was supported in part by the Ministry of Education, Science, Sports and Culture of Japan under a Grand-in-Aid (16686022, 10136533) and in part by the Energy Use Rationalization Technology and Strategy Developments Program in 2005 from the New Energy and Industrial Technology Development Organization (NEDO, Project P03033) of Japan.
PY - 2007/6
Y1 - 2007/6
N2 - Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.
AB - Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.
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U2 - 10.1109/TMAG.2007.893778
DO - 10.1109/TMAG.2007.893778
M3 - Article
AN - SCOPUS:34249041201
SN - 0018-9464
VL - 43
SP - 2672
EP - 2676
JO - IEEE Transactions on Magnetics
JF - IEEE Transactions on Magnetics
IS - 6
ER -