Safe membrane-releasing process for thermoelectric hydrogen gas sensor

L. F. Houlet, W. Shin, Maiko Nishibori, N. Izu, T. Itoh, I. Matsubara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present here a safe membrane-releasing process in KOH for the fabrication of a high performance freestanding device and the mass production of a single membrane device for the hydrogen gas sensing application. The fabricated devices are thermoelectric hydrogen gas sensors based on the thermoelectric detection of the catalytic hydrogen combustion. The free-standing device has a voltage response 2.7 times higher than the single membrane device. The proposed membrane-releasing process, which combines black wax and a KOH protective polymer coat, shows fabrication yields of 31%, 50% for the free-standing device and 47% for the single-membrane device produced in mass.

Original languageEnglish
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Pages1032-1035
Number of pages4
DOIs
Publication statusPublished - Dec 1 2007
Externally publishedYes
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: Oct 28 2007Oct 31 2007

Publication series

NameProceedings of IEEE Sensors

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
CountryUnited States
CityAtlanta, GA
Period10/28/0710/31/07

Fingerprint

Chemical sensors
Membranes
Hydrogen
Fabrication
Waxes
Electric potential
Polymers
Gases

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Houlet, L. F., Shin, W., Nishibori, M., Izu, N., Itoh, T., & Matsubara, I. (2007). Safe membrane-releasing process for thermoelectric hydrogen gas sensor. In The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 (pp. 1032-1035). [4388581] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.4388581

Safe membrane-releasing process for thermoelectric hydrogen gas sensor. / Houlet, L. F.; Shin, W.; Nishibori, Maiko; Izu, N.; Itoh, T.; Matsubara, I.

The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007. 2007. p. 1032-1035 4388581 (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Houlet, LF, Shin, W, Nishibori, M, Izu, N, Itoh, T & Matsubara, I 2007, Safe membrane-releasing process for thermoelectric hydrogen gas sensor. in The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007., 4388581, Proceedings of IEEE Sensors, pp. 1032-1035, 6th IEEE Conference on SENSORS, IEEE SENSORS 2007, Atlanta, GA, United States, 10/28/07. https://doi.org/10.1109/ICSENS.2007.4388581
Houlet LF, Shin W, Nishibori M, Izu N, Itoh T, Matsubara I. Safe membrane-releasing process for thermoelectric hydrogen gas sensor. In The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007. 2007. p. 1032-1035. 4388581. (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.4388581
Houlet, L. F. ; Shin, W. ; Nishibori, Maiko ; Izu, N. ; Itoh, T. ; Matsubara, I. / Safe membrane-releasing process for thermoelectric hydrogen gas sensor. The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007. 2007. pp. 1032-1035 (Proceedings of IEEE Sensors).
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