Scanning angle control of the optical micro scanner actuated by electrostatic force

Noriaki Ishikawa, Kentaro Ikeda, Koji Okazaki, Renshi Sawada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    3 Citations (Scopus)

    Abstract

    The optical micro scanner is used for various applications, but its scanning performance is affected by temperature. In this paper, we report the temperature dependence of the optical scan angle and the way to control it. It was found that the optical scan angle became small when the temperature rose. However, it was possible to make the optical scan angle constant by regulating the DC voltage that was applied between two comb-electrodes of the optical micro scanner.

    Original languageEnglish
    Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
    PublisherIEEE Computer Society
    Pages121-122
    Number of pages2
    ISBN (Electronic)9780992841423
    DOIs
    Publication statusPublished - Oct 14 2014
    Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
    Duration: Aug 17 2014Aug 21 2014

    Publication series

    NameInternational Conference on Optical MEMS and Nanophotonics
    ISSN (Print)2160-5033
    ISSN (Electronic)2160-5041

    Other

    Other2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
    CountryUnited Kingdom
    CityGlasgow
    Period8/17/148/21/14

    All Science Journal Classification (ASJC) codes

    • Hardware and Architecture
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

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