Scanning angle control of the optical micro scanner actuated by electrostatic force

Noriaki Ishikawa, Kentaro Ikeda, Koji Okazaki, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

The optical micro scanner is used for various applications, but its scanning performance is affected by temperature. In this paper, we report the temperature dependence of the optical scan angle and the way to control it. It was found that the optical scan angle became small when the temperature rose. However, it was possible to make the optical scan angle constant by regulating the DC voltage that was applied between two comb-electrodes of the optical micro scanner.

Original languageEnglish
Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PublisherIEEE Computer Society
Pages121-122
Number of pages2
ISBN (Electronic)9780992841423
DOIs
Publication statusPublished - Oct 14 2014
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: Aug 17 2014Aug 21 2014

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period8/17/148/21/14

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Ishikawa, N., Ikeda, K., Okazaki, K., & Sawada, R. (2014). Scanning angle control of the optical micro scanner actuated by electrostatic force. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings (pp. 121-122). [6924550] (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2014.6924550