Scanning measurement of step height and freeform surface by using optically trapped microsphere

M. Michihata; Y. Takaya; T. Washitani; T. Hayashi

Scanning measurement of step height and freeform surface by using optically trapped microsphere

M. Michihata, Y. Takaya, T. Washitani, T. Hayashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Currently we study the scanning type probe for surface profile by developing the optically trapped microsphere. In this paper, firstly performance of the scanning mode was examined by comparing with the tactile mode. Secondly, the method to measure a step height with scanning mode was proposed. At first, profile measurement of an aspheric lens by both tactile and scanning mode was conducted in order to assess the scanning mode with the standing wave scale. The measured results shows that the measured shape by scanning mode was coincident with the result by the tactile mode well. Besides, it was proposed the method to evaluate a step height with the optically trapped scanning probe with the SWS through measurement of the micro-groove depth. The results of a step height measurement were agreed with one from FE-SEM.

Original language	English
Title of host publication	Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Editors	Paul Shore, H. Spaan, Theresa Burke
Publisher	euspen
Pages	64-67
Number of pages	4
ISBN (Electronic)	9780956679000
Publication status	Published - 2012
Externally published	Yes
Event	12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, Sweden Duration: Jun 4 2012 → Jun 7 2012

Publication series

Name	Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Volume	1

Other

Other	12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Country	Sweden
City	Stockholm
Period	6/4/12 → 6/7/12

All Science Journal Classification (ASJC) codes

Industrial and Manufacturing Engineering
Mechanical Engineering
Instrumentation
Environmental Engineering
Materials Science(all)

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Cite this

Michihata, M., Takaya, Y., Washitani, T., & Hayashi, T. (2012). Scanning measurement of step height and freeform surface by using optically trapped microsphere. In P. Shore, H. Spaan, & T. Burke (Eds.), Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 (pp. 64-67). (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 1). euspen.

Scanning measurement of step height and freeform surface by using optically trapped microsphere. / Michihata, M.; Takaya, Y.; Washitani, T.; Hayashi, T.

Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. ed. / Paul Shore; H. Spaan; Theresa Burke. euspen, 2012. p. 64-67 (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Michihata, M, Takaya, Y, Washitani, T & Hayashi, T 2012, Scanning measurement of step height and freeform surface by using optically trapped microsphere. in P Shore, H Spaan & T Burke (eds), Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, vol. 1, euspen, pp. 64-67, 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, Stockholm, Sweden, 6/4/12.

Michihata M, Takaya Y, Washitani T, Hayashi T. Scanning measurement of step height and freeform surface by using optically trapped microsphere. In Shore P, Spaan H, Burke T, editors, Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. euspen. 2012. p. 64-67. (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012).

Michihata, M. ; Takaya, Y. ; Washitani, T. ; Hayashi, T. / Scanning measurement of step height and freeform surface by using optically trapped microsphere. Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. editor / Paul Shore ; H. Spaan ; Theresa Burke. euspen, 2012. pp. 64-67 (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012).

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