Abstract
Currently we study the scanning type probe for surface profile by developing the optically trapped microsphere. In this paper, firstly performance of the scanning mode was examined by comparing with the tactile mode. Secondly, the method to measure a step height with scanning mode was proposed. At first, profile measurement of an aspheric lens by both tactile and scanning mode was conducted in order to assess the scanning mode with the standing wave scale. The measured results shows that the measured shape by scanning mode was coincident with the result by the tactile mode well. Besides, it was proposed the method to evaluate a step height with the optically trapped scanning probe with the SWS through measurement of the micro-groove depth. The results of a step height measurement were agreed with one from FE-SEM.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 |
| Editors | Paul Shore, H. Spaan, Theresa Burke |
| Publisher | euspen |
| Pages | 64-67 |
| Number of pages | 4 |
| ISBN (Electronic) | 9780956679000 |
| Publication status | Published - Jan 1 2012 |
| Externally published | Yes |
| Event | 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, Sweden Duration: Jun 4 2012 → Jun 7 2012 |
Publication series
| Name | Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 |
|---|---|
| Volume | 1 |
Other
| Other | 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 |
|---|---|
| Country | Sweden |
| City | Stockholm |
| Period | 6/4/12 → 6/7/12 |
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All Science Journal Classification (ASJC) codes
- Industrial and Manufacturing Engineering
- Mechanical Engineering
- Instrumentation
- Environmental Engineering
- Materials Science(all)
Cite this
Scanning measurement of step height and freeform surface by using optically trapped microsphere. / Michihata, M.; Takaya, Y.; Washitani, T.; Hayashi, T.
Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. ed. / Paul Shore; H. Spaan; Theresa Burke. euspen, 2012. p. 64-67 (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 1).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Scanning measurement of step height and freeform surface by using optically trapped microsphere
AU - Michihata, M.
AU - Takaya, Y.
AU - Washitani, T.
AU - Hayashi, T.
PY - 2012/1/1
Y1 - 2012/1/1
N2 - Currently we study the scanning type probe for surface profile by developing the optically trapped microsphere. In this paper, firstly performance of the scanning mode was examined by comparing with the tactile mode. Secondly, the method to measure a step height with scanning mode was proposed. At first, profile measurement of an aspheric lens by both tactile and scanning mode was conducted in order to assess the scanning mode with the standing wave scale. The measured results shows that the measured shape by scanning mode was coincident with the result by the tactile mode well. Besides, it was proposed the method to evaluate a step height with the optically trapped scanning probe with the SWS through measurement of the micro-groove depth. The results of a step height measurement were agreed with one from FE-SEM.
AB - Currently we study the scanning type probe for surface profile by developing the optically trapped microsphere. In this paper, firstly performance of the scanning mode was examined by comparing with the tactile mode. Secondly, the method to measure a step height with scanning mode was proposed. At first, profile measurement of an aspheric lens by both tactile and scanning mode was conducted in order to assess the scanning mode with the standing wave scale. The measured results shows that the measured shape by scanning mode was coincident with the result by the tactile mode well. Besides, it was proposed the method to evaluate a step height with the optically trapped scanning probe with the SWS through measurement of the micro-groove depth. The results of a step height measurement were agreed with one from FE-SEM.
UR - http://www.scopus.com/inward/record.url?scp=84911379978&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84911379978&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84911379978
T3 - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
SP - 64
EP - 67
BT - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
A2 - Shore, Paul
A2 - Spaan, H.
A2 - Burke, Theresa
PB - euspen
ER -