TY - GEN
T1 - Scanning measurement of step height and freeform surface by using optically trapped microsphere
AU - Michihata, M.
AU - Takaya, Y.
AU - Washitani, T.
AU - Hayashi, T.
PY - 2012
Y1 - 2012
N2 - Currently we study the scanning type probe for surface profile by developing the optically trapped microsphere. In this paper, firstly performance of the scanning mode was examined by comparing with the tactile mode. Secondly, the method to measure a step height with scanning mode was proposed. At first, profile measurement of an aspheric lens by both tactile and scanning mode was conducted in order to assess the scanning mode with the standing wave scale. The measured results shows that the measured shape by scanning mode was coincident with the result by the tactile mode well. Besides, it was proposed the method to evaluate a step height with the optically trapped scanning probe with the SWS through measurement of the micro-groove depth. The results of a step height measurement were agreed with one from FE-SEM.
AB - Currently we study the scanning type probe for surface profile by developing the optically trapped microsphere. In this paper, firstly performance of the scanning mode was examined by comparing with the tactile mode. Secondly, the method to measure a step height with scanning mode was proposed. At first, profile measurement of an aspheric lens by both tactile and scanning mode was conducted in order to assess the scanning mode with the standing wave scale. The measured results shows that the measured shape by scanning mode was coincident with the result by the tactile mode well. Besides, it was proposed the method to evaluate a step height with the optically trapped scanning probe with the SWS through measurement of the micro-groove depth. The results of a step height measurement were agreed with one from FE-SEM.
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M3 - Conference contribution
AN - SCOPUS:84911379978
T3 - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
SP - 64
EP - 67
BT - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
A2 - Shore, Paul
A2 - Spaan, H.
A2 - Burke, Theresa
PB - euspen
T2 - 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Y2 - 4 June 2012 through 7 June 2012
ER -