Scanning measurement of step height and freeform surface by using optically trapped microsphere

M. Michihata, Y. Takaya, T. Washitani, T. Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Currently we study the scanning type probe for surface profile by developing the optically trapped microsphere. In this paper, firstly performance of the scanning mode was examined by comparing with the tactile mode. Secondly, the method to measure a step height with scanning mode was proposed. At first, profile measurement of an aspheric lens by both tactile and scanning mode was conducted in order to assess the scanning mode with the standing wave scale. The measured results shows that the measured shape by scanning mode was coincident with the result by the tactile mode well. Besides, it was proposed the method to evaluate a step height with the optically trapped scanning probe with the SWS through measurement of the micro-groove depth. The results of a step height measurement were agreed with one from FE-SEM.

Original languageEnglish
Title of host publicationProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
EditorsPaul Shore, H. Spaan, Theresa Burke
Publishereuspen
Pages64-67
Number of pages4
ISBN (Electronic)9780956679000
Publication statusPublished - 2012
Externally publishedYes
Event12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, Sweden
Duration: Jun 4 2012Jun 7 2012

Publication series

NameProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Volume1

Other

Other12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
CountrySweden
CityStockholm
Period6/4/126/7/12

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering
  • Materials Science(all)

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