Scattering of electrons by CH4, CF4 and SF 6 in the 75-700 eV range

T. Sakae, S. Sumiyoshi, E. Murakami, Y. Matsumoto, K. Ishibashi, A. Katase

Research output: Contribution to journalArticle

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Abstract

Differential cross sections (DCS) have been measured by the crossed-beam method. The angular range is 5-135' and the electron energies are 75, 100, 150, 200, 300, 500 and 700 eV. The overall energy resolution is not sufficient to discriminate elastic scatterings from rotational and vibrational excitations. The absolute DCS are determined by using a gas chamber on the basis of the known absolute DCS for He. The experimental DCS are extrapolated to 0' and 180' scattering angles by fitting the square of the Legendre polynomials to the measured values. The integral and momentum transfer cross sections are then obtained. The errors are about 10% for all experimental results. The present data for CH4 agree well with the previous measurements and calculations. For CF4 and SF6, the DCS increase steeply at the forward angles. The integral cross sections obtained are consistent with the previous results for total and inelastic cross sections.

Original languageEnglish
Article number011
Pages (from-to)1385-1394
Number of pages10
JournalJournal of Physics B: Atomic, Molecular and Optical Physics
Volume22
Issue number9
DOIs
Publication statusPublished - Dec 1 1989

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cross sections
scattering
electrons
Legendre functions
momentum transfer
elastic scattering
chambers
electron energy
gases
excitation
energy

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

Cite this

Sakae, T., Sumiyoshi, S., Murakami, E., Matsumoto, Y., Ishibashi, K., & Katase, A. (1989). Scattering of electrons by CH4, CF4 and SF 6 in the 75-700 eV range. Journal of Physics B: Atomic, Molecular and Optical Physics, 22(9), 1385-1394. [011]. https://doi.org/10.1088/0953-4075/22/9/011

Scattering of electrons by CH4, CF4 and SF 6 in the 75-700 eV range. / Sakae, T.; Sumiyoshi, S.; Murakami, E.; Matsumoto, Y.; Ishibashi, K.; Katase, A.

In: Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 22, No. 9, 011, 01.12.1989, p. 1385-1394.

Research output: Contribution to journalArticle

Sakae, T, Sumiyoshi, S, Murakami, E, Matsumoto, Y, Ishibashi, K & Katase, A 1989, 'Scattering of electrons by CH4, CF4 and SF 6 in the 75-700 eV range', Journal of Physics B: Atomic, Molecular and Optical Physics, vol. 22, no. 9, 011, pp. 1385-1394. https://doi.org/10.1088/0953-4075/22/9/011
Sakae, T. ; Sumiyoshi, S. ; Murakami, E. ; Matsumoto, Y. ; Ishibashi, K. ; Katase, A. / Scattering of electrons by CH4, CF4 and SF 6 in the 75-700 eV range. In: Journal of Physics B: Atomic, Molecular and Optical Physics. 1989 ; Vol. 22, No. 9. pp. 1385-1394.
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AU - Katase, A.

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