Selective area laser-assisted doping of SiC thin films and blue light electroluminescence

Emmanuel Paneerselvam, Toshifumi Kikuchi, Hiroshi Ikenoue, Nilesh J. Vasa, I. A. Palani, Mitsuhiro Higashihata, Daisuke Nakamura, M. S. Ramachandra Rao

Research output: Contribution to journalArticle

Abstract

Laser-assisted doping combined with annealing technique is used in selective areas to form a p-n junction on a SiC thin film grown by the pulsed laser deposition on a Si substrate at a temperature of 800 °C. This approach in an aluminum chloride solution and a phosphoric solution has resulted in p-SiC/n-Si and n-SiC/p-Si hetero-structures, respectively. Further, a functional in-plane p-n junction is realized side-by-side on the post-deposited SiC thin film. I-V characteristics by two probe technique showed the p-n diode characteristics. Blue light (400 nm) electroluminescence from the p-n junction on SiC thin film was observed in the forward biased condition. Further, an improvement in the I-V reverse characteristics was observed by illuminating the p-n SiC thin film with green/blue light.

Original languageEnglish
Article number48LT01
JournalJournal of Physics D: Applied Physics
Volume52
Issue number48
DOIs
Publication statusPublished - Sep 12 2019

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Electroluminescence
electroluminescence
p-n junctions
Doping (additives)
Thin films
Lasers
thin films
lasers
aluminum chlorides
Aluminum chloride
Pulsed laser deposition
illuminating
pulsed laser deposition
Diodes
diodes
Annealing
annealing
probes
Substrates
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

Cite this

Paneerselvam, E., Kikuchi, T., Ikenoue, H., Vasa, N. J., Palani, I. A., Higashihata, M., ... Ramachandra Rao, M. S. (2019). Selective area laser-assisted doping of SiC thin films and blue light electroluminescence. Journal of Physics D: Applied Physics, 52(48), [48LT01]. https://doi.org/10.1088/1361-6463/ab3e97

Selective area laser-assisted doping of SiC thin films and blue light electroluminescence. / Paneerselvam, Emmanuel; Kikuchi, Toshifumi; Ikenoue, Hiroshi; Vasa, Nilesh J.; Palani, I. A.; Higashihata, Mitsuhiro; Nakamura, Daisuke; Ramachandra Rao, M. S.

In: Journal of Physics D: Applied Physics, Vol. 52, No. 48, 48LT01, 12.09.2019.

Research output: Contribution to journalArticle

Paneerselvam, Emmanuel ; Kikuchi, Toshifumi ; Ikenoue, Hiroshi ; Vasa, Nilesh J. ; Palani, I. A. ; Higashihata, Mitsuhiro ; Nakamura, Daisuke ; Ramachandra Rao, M. S. / Selective area laser-assisted doping of SiC thin films and blue light electroluminescence. In: Journal of Physics D: Applied Physics. 2019 ; Vol. 52, No. 48.
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AU - Palani, I. A.

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