Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate

W. Nomura, T. Yatsui, Y. Yanase, K. Suzuki, M. Fujita, A. Kamata, M. Naruse, M. Ohtsu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The scratches on the surface of Al2O3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2010
Publication statusPublished - Dec 1 2010
EventConference on Lasers and Electro-Optics, CLEO 2010 - San Jose, CA, United States
Duration: May 16 2010May 21 2010

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics, CLEO 2010
CountryUnited States
CitySan Jose, CA
Period5/16/105/21/10

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Nomura, W., Yatsui, T., Yanase, Y., Suzuki, K., Fujita, M., Kamata, A., ... Ohtsu, M. (2010). Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate. In Conference on Lasers and Electro-Optics, CLEO 2010 (Optics InfoBase Conference Papers).