Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate

W. Nomura, T. Yatsui, Y. Yanase, K. Suzuki, M. Fujita, A. Kamata, M. Naruse, M. Ohtsu

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    The scratches on the surface of Al2O3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.

    Original languageEnglish
    Title of host publicationConference on Lasers and Electro-Optics
    Subtitle of host publicationApplications, CLEO_Apps 2010
    Publication statusPublished - Dec 1 2010
    EventConference on Lasers and Electro-Optics: Applications, CLEO_Apps 2010 - San Jose, CA, United States
    Duration: May 16 2010May 21 2010

    Other

    OtherConference on Lasers and Electro-Optics: Applications, CLEO_Apps 2010
    CountryUnited States
    CitySan Jose, CA
    Period5/16/105/21/10

    All Science Journal Classification (ASJC) codes

    • Instrumentation
    • Atomic and Molecular Physics, and Optics

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  • Cite this

    Nomura, W., Yatsui, T., Yanase, Y., Suzuki, K., Fujita, M., Kamata, A., Naruse, M., & Ohtsu, M. (2010). Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate. In Conference on Lasers and Electro-Optics: Applications, CLEO_Apps 2010