Sensing a vertical surface by measuring a fluorescence signal using a confocal optical system

M. Michihata, A. Fukui, Terutake Hayashi, Y. Takaya

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We have developed an optical technique for sensing a vertical surface by utilizing fluorescence signals. The measured surface was coated with a fluorescent dye. First, the angular range of the fluorescence emission from the surface was experimentally investigated. The experimental results revealed that the fluorescence was emitted over a wide range of angles greater than 10° from the surface, which is wide enough to enable the detection of a vertical surface. Second, the surface of a fluorescent-dye-coated silicon wafer was sensed using a fluorescent confocal optical system. The vertical surface was scanned horizontally with a laser beam, and the detected signal was found to have a specific peak of 3μm at full width at half maximum. Thus, the vertical surface was sensed successfully by the fluorescent confocal optical system.

Original languageEnglish
Article number064004
JournalMeasurement Science and Technology
Volume25
Issue number6
DOIs
Publication statusPublished - Jan 1 2014
Externally publishedYes

Fingerprint

Confocal
Optical systems
Optical System
Fluorescence
Sensing
Vertical
fluorescence
Dyes
dyes
Full width at half maximum
Silicon wafers
Laser Beam
Wafer
Range of data
Laser beams
Silicon
wafers
laser beams
Angle
Experimental Results

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

Cite this

Sensing a vertical surface by measuring a fluorescence signal using a confocal optical system. / Michihata, M.; Fukui, A.; Hayashi, Terutake; Takaya, Y.

In: Measurement Science and Technology, Vol. 25, No. 6, 064004, 01.01.2014.

Research output: Contribution to journalArticle

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