Sensing characteristics of ISFET-based hydrogen sensor using proton-conductive thick film

Norio Miura, Tatsuro Harada, Nobuaki Yoshida, Youichi Shimizu, Noboru Yamazoe

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

An FET-based microsensor using a proton conductor for detecting a small concentration of H2 in air at room temperature has been fabricated by attaching an antimonic-acid thick film (≈ 20 μm thick) and a sensing Pt electrode to an ISFET device. Under a constant drain current (ID) at 30°C, the output voltage (VGS) between the sensing electrode and the source is almost linearly correlated with the logarithm of H2 concentration in the range 4-5000 ppm. The slope of the correlation, ≈ - 120 mV/decade, is comparable to that for the non-FET type solid-state potentiometric H2 sensor previously reported. The 90% response time to 5000 ppm H2 is as short as ≈ 5 s. The H2-sensing mechanism of the present microsensor is briefly discussed.

Original languageEnglish
Pages (from-to)499-503
Number of pages5
JournalSensors and Actuators: B. Chemical
Volume25
Issue number1-3
DOIs
Publication statusPublished - Jan 1 1995

Fingerprint

Ion sensitive field effect transistors
Microsensors
Conductive films
Thick films
thick films
Protons
Hydrogen
Electrodes
protons
Drain current
sensors
Sensors
hydrogen
Field effect transistors
electrodes
logarithms
Acids
Electric potential
field effect transistors
conductors

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Sensing characteristics of ISFET-based hydrogen sensor using proton-conductive thick film. / Miura, Norio; Harada, Tatsuro; Yoshida, Nobuaki; Shimizu, Youichi; Yamazoe, Noboru.

In: Sensors and Actuators: B. Chemical, Vol. 25, No. 1-3, 01.01.1995, p. 499-503.

Research output: Contribution to journalArticle

Miura, Norio ; Harada, Tatsuro ; Yoshida, Nobuaki ; Shimizu, Youichi ; Yamazoe, Noboru. / Sensing characteristics of ISFET-based hydrogen sensor using proton-conductive thick film. In: Sensors and Actuators: B. Chemical. 1995 ; Vol. 25, No. 1-3. pp. 499-503.
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