Abstract
Arc plasma treatments of Fe-Co-Ni alloy using Ar, Ar-Cl2, Ar-N2, Ar-O2, Ar-Cl2-N2 and Ar-Cl2-O2 arc plasmas with varying O2 flow rate were examined. Large amounts of fumes were formed when Ar-Cl2-N2 and Ar-Cl2-O2 plasmas were used. The Fe component was separated selectively from the alloy using Ar-Cl2, Ar-Cl2-N2 and Ar-Cl2-O2 plasmas with a small concentration of O2, while the Co component was separated using Ar-Cl2-O2 plasmas with a high concentration of O2. The separation of Fe components was attributed to the selective chlorination of Fe. The separation of Co was attributed to both the chlorination of Co and the oxidation of Fe.
Original language | English |
---|---|
Pages (from-to) | 179-185 |
Number of pages | 7 |
Journal | Thin Solid Films |
Volume | 407 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - Mar 22 2002 |
Externally published | Yes |
Event | Proceedinggs of the 14th Symposium on Plasma Science for Marteri (SPSM-14) - Tokyo, Japan Duration: Jun 13 2001 → Jun 14 2001 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry