Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)

S. Kono, T. Sasaki, M. Inaba, A. Hiraiwa, H. Kawarada

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The sheet resistance (Rsk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that Rsk is about ~ 200 times larger than the sheet resistance, Rsh, in the open areas without Au-electrodes. The specific contact resistance, RC, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, RC is suggested to be of the order of 1 × 10− 3 – 1 × 10− 4 Ωcm2.

Original languageEnglish
Pages (from-to)93-98
Number of pages6
JournalDiamond and Related Materials
Volume80
DOIs
Publication statusPublished - Nov 2017
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)'. Together they form a unique fingerprint.

  • Cite this