Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)

S. Kono, T. Sasaki, Masafumi Inaba, A. Hiraiwa, H. Kawarada

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The sheet resistance (Rsk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that Rsk is about ~ 200 times larger than the sheet resistance, Rsh, in the open areas without Au-electrodes. The specific contact resistance, RC, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, RC is suggested to be of the order of 1 × 10− 3 – 1 × 10− 4 Ωcm2.

Original languageEnglish
Pages (from-to)93-98
Number of pages6
JournalDiamond and Related Materials
Volume80
DOIs
Publication statusPublished - Nov 1 2017
Externally publishedYes

Fingerprint

Diamond
Sheet resistance
Hydrogen
Diamonds
Electrodes
Voltage measurement
Electric current measurement
Contact resistance
Electric lines

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001). / Kono, S.; Sasaki, T.; Inaba, Masafumi; Hiraiwa, A.; Kawarada, H.

In: Diamond and Related Materials, Vol. 80, 01.11.2017, p. 93-98.

Research output: Contribution to journalArticle

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AU - Kawarada, H.

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