SiC/Si-dots multilayer structures formed by supersonic free jets of CH 3SiH3 and Si3H8

Yoshifumi Ikoma, Ryota Ohtani, Nobuaki Matsui, Teruaki Motooka

    Research output: Contribution to journalArticlepeer-review

    6 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'SiC/Si-dots multilayer structures formed by supersonic free jets of CH <sub>3</sub>SiH<sub>3</sub> and Si<sub>3</sub>H<sub>8</sub>'. Together they form a unique fingerprint.

    Physics & Astronomy

    Engineering & Materials Science