Silicon fine structure formation on sapphire with Focused Ion Beam

D. J. Bai, Y. Q. Zhang, A. Matsushita, A. Baba, A. Kenjo, T. Sadoh, H. Nakashima, H. Mori, T. Tsurushima

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Silicon fine structure formation on sapphire with Focused Ion Beam'. Together they form a unique fingerprint.

Engineering

Material Science

Biochemistry, Genetics and Molecular Biology