Silicon fine structure formation on sapphire with Focused Ion Beam

D. J. Bai, Y. Q. Zhang, A. Matsushita, A. Baba, A. Kenjo, Taizoh Sadoh, Hiroshi Nakashima, H. Mori, T. Tsurushima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

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Engineering & Materials Science