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Silicon fine structure formation on sapphire with Focused Ion Beam
D. J. Bai, Y. Q. Zhang, A. Matsushita, A. Baba, A. Kenjo, Taizoh Sadoh, Hiroshi Nakashima, H. Mori, T. Tsurushima
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
3
Citations
(Scopus)