Silicon twisted cone structure produced by optical vortex pulse with structure evaluation by radiation hydrodynamic simulation

Daisuke Nakamura, Ryohei Tasaki, Miki Kawamoto, Hiroki Oshima, Mitsuhiro Higashihata, Hiroshi Ikenoue, Toshitaka Wakayama, Atsushi Sunahara, Takeshi Higashiguchi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

We demonstrate a radiation hydrodynamic simulation of optical vortex pulse-ablated microcone structures on silicon (Si) substrates. Doughnut-shaped craters were formed by single pulse irradiation on the Si substrate, and a twisted cone structure with a height of 3.5 µm was created at the center of the irradiation spot by the circularly polarized optical vortex pulse. A two-dimensional (2-D) radiation hydrodynamic simulation reproduced the cone structure well with a height of 3 µm. The central part of the incident laser power was lowered from the initial profile due to plasma shielding over the laser pulse duration for an inverted double-well laser profile. The acute tip shape of the silicon surface can survive over the laser irradiation period.

Original languageEnglish
Article number20512
JournalScientific reports
Volume10
Issue number1
DOIs
Publication statusPublished - Dec 2020

All Science Journal Classification (ASJC) codes

  • General

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