TY - JOUR
T1 - Silicon twisted cone structure produced by optical vortex pulse with structure evaluation by radiation hydrodynamic simulation
AU - Nakamura, Daisuke
AU - Tasaki, Ryohei
AU - Kawamoto, Miki
AU - Oshima, Hiroki
AU - Higashihata, Mitsuhiro
AU - Ikenoue, Hiroshi
AU - Wakayama, Toshitaka
AU - Sunahara, Atsushi
AU - Higashiguchi, Takeshi
N1 - Funding Information:
We wish to thank Misaki Shoji, Ryo Kageyama, and Hiromu Kawasaki (Utsunomiya University) for the useful technical support and discussion. This work was supported by the Japan Society for the Promotion of Science (JP18K12114 and JP20H02157), CASIO Science Promotion Foundation (R01-23), The Murata Science Foundation (H31-075 and M20-071), and The Amada Foundation (AF-2019204-B2).
Publisher Copyright:
© 2020, The Author(s).
PY - 2020/12
Y1 - 2020/12
N2 - We demonstrate a radiation hydrodynamic simulation of optical vortex pulse-ablated microcone structures on silicon (Si) substrates. Doughnut-shaped craters were formed by single pulse irradiation on the Si substrate, and a twisted cone structure with a height of 3.5 µm was created at the center of the irradiation spot by the circularly polarized optical vortex pulse. A two-dimensional (2-D) radiation hydrodynamic simulation reproduced the cone structure well with a height of 3 µm. The central part of the incident laser power was lowered from the initial profile due to plasma shielding over the laser pulse duration for an inverted double-well laser profile. The acute tip shape of the silicon surface can survive over the laser irradiation period.
AB - We demonstrate a radiation hydrodynamic simulation of optical vortex pulse-ablated microcone structures on silicon (Si) substrates. Doughnut-shaped craters were formed by single pulse irradiation on the Si substrate, and a twisted cone structure with a height of 3.5 µm was created at the center of the irradiation spot by the circularly polarized optical vortex pulse. A two-dimensional (2-D) radiation hydrodynamic simulation reproduced the cone structure well with a height of 3 µm. The central part of the incident laser power was lowered from the initial profile due to plasma shielding over the laser pulse duration for an inverted double-well laser profile. The acute tip shape of the silicon surface can survive over the laser irradiation period.
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U2 - 10.1038/s41598-020-77323-4
DO - 10.1038/s41598-020-77323-4
M3 - Article
C2 - 33262358
AN - SCOPUS:85096976552
VL - 10
JO - Scientific Reports
JF - Scientific Reports
SN - 2045-2322
IS - 1
M1 - 20512
ER -