Silicon wafer cleaning using new liquid aerosol with controlled droplet velocity and size by rotary atomizer method

Yoshiyuki Seike, Keiji Miyachi, Tatsuo Shibata, Yoshinori Kobayashi, Syuhei Kurokawa, Toshiro Doi

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

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Pharmacology, Toxicology and Pharmaceutical Science

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Chemical Engineering