Fingerprint
Dive into the research topics of 'Similarities in spatial distributions of absolute GeH2 density, radical production rate and particle amount in GeH4 RF discharges'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Similarities in spatial distributions of absolute GeH2 density, radical production rate and particle amount in GeH4 RF discharges
Hiroharu Kawasaki, Junichirou Kida, Kazutaka Sakamoto, Tsuyoshi Fukuzawa, Masaharu Shiratani, Yukio Watanabe
Research output: Contribution to journal › Article › peer-review
9
Citations
(Scopus)