We have developed a simple and low-cost optical measurement system for the simultaneous measurement of the five-degrees-of-freedom error motions of high-speed microspindles. We demonstrated the usefulness of the system by using it to measure actual spindle rotation errors, and analyzed the major error factors. First, the measurement error due to the form error of the lens was analyzed by ray tracing. Second, we analyzed the measurement error due to a displacement of an irradiation laser point on a 3 mm diameter ball lens. Furthermore, we investigated the effect of the centrifugal force and the crosstalk problem of multiple laser beams. The results indicated that a form error of the rod lens significantly affected the measurement accuracy and that a change in the laser beam irradiation point of the ball lens due to a radial displacement had no significant effect on the measurement accuracy. Finally, we confirmed that, owing to the centrifugal force, the measurement accuracy decreased as the speed of rotation increased, and that there was no crosstalk that the reflected and transmitted laser beams in the X direction were detected by the photodiode in the Y direction for displacements within -10 to 10 μm.
|Number of pages||8|
|Publication status||Published - Apr 1 2014|
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