Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle

H. Murakami, A. Katsuki, Takao Sajima, N. Nakayama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a simple and low-cost optical measurement system to measure simultaneously five-degrees-of-freedom error motions of high-speed microspindles. In this study, measurement error due to displacement of an irradiation laser spot on a 3 mm diameter ball lens is analyzed. The results show that the maximum error in the Z direction due to the 7μm displacement of the laser spot in the X direction is about 0.15 nm, i.e., the change of the laser beam irradiation point of the ball lens caused by the radial displacement has little effect on the measurement accuracy.

Original languageEnglish
Title of host publicationProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
EditorsH. Spaan, Theresa Burke, Paul Shore
Publishereuspen
Pages46-49
Number of pages4
ISBN (Electronic)9780956679000
Publication statusPublished - Jan 1 2012
Event12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, Sweden
Duration: Jun 4 2012Jun 7 2012

Publication series

NameProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Volume2

Other

Other12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
CountrySweden
CityStockholm
Period6/4/126/7/12

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All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering
  • Materials Science(all)

Cite this

Murakami, H., Katsuki, A., Sajima, T., & Nakayama, N. (2012). Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle. In H. Spaan, T. Burke, & P. Shore (Eds.), Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 (pp. 46-49). (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; Vol. 2). euspen.