Abstract
The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined by using a two-dimensional Monte Carlo fluid hybrid model. The simulation results showed that the electron density is maximum at a certain pressure between the discharge electrodes and significantly decreases outside the electrodes at a high gas pressure. The power absorption efficiency between the electrodes was improved by increasing the gas pressure. In addition, the plasma was produced efficiently between the electrodes at low applied voltages.
Original language | English |
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Article number | 11ND01 |
Journal | Japanese journal of applied physics |
Volume | 52 |
Issue number | 11 PART 2 |
DOIs | |
Publication status | Published - Nov 2013 |
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)