Simulation of effective production of very high frequency hydrogen plasma using a balanced power feeding method

Kohei Ogiwara; Weiting Chen; Kiichiro Uchino; Yoshinobu Kawai

doi:10.7567/JJAP.52.11ND01

Simulation of effective production of very high frequency hydrogen plasma using a balanced power feeding method

Kohei Ogiwara, Weiting Chen, Kiichiro Uchino, Yoshinobu Kawai

Electrical Engineering Sciences

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined by using a two-dimensional Monte Carlo fluid hybrid model. The simulation results showed that the electron density is maximum at a certain pressure between the discharge electrodes and significantly decreases outside the electrodes at a high gas pressure. The power absorption efficiency between the electrodes was improved by increasing the gas pressure. In addition, the plasma was produced efficiently between the electrodes at low applied voltages.

Original language	English
Article number	11ND01
Journal	Japanese journal of applied physics
Volume	52
Issue number	11 PART 2
DOIs	https://doi.org/10.7567/JJAP.52.11ND01
Publication status	Published - Nov 2013

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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