Simulation of effective production of very high frequency hydrogen plasma using a balanced power feeding method

Kohei Ogiwara, Weiting Chen, Kiichiro Uchino, Yoshinobu Kawai

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Abstract

The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined by using a two-dimensional Monte Carlo fluid hybrid model. The simulation results showed that the electron density is maximum at a certain pressure between the discharge electrodes and significantly decreases outside the electrodes at a high gas pressure. The power absorption efficiency between the electrodes was improved by increasing the gas pressure. In addition, the plasma was produced efficiently between the electrodes at low applied voltages.

Original languageEnglish
Article number11ND01
JournalJapanese Journal of Applied Physics
Volume52
Issue number11 PART 2
DOIs
Publication statusPublished - Nov 1 2013

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All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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