Simulation of Geometrical Change Effects on Electrical Characteristics of Micrometer-Size Vacuum Triode with Field Emitters

Tanemasa Asano

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

Change in electrical characteristic of a micro-vacuum triode with a field electron emitter, due to change in physical dimension which may appear in the fabrication process, has been simulated. It has been found that the variation of the grid opening size more strongly affects the electrical characteristics of the triodes than the misalignment between the emitter tip and center of the grid opening. It has also been found, however, that such effect can be minimized by biasing the grid at a proper voltage. Effects of grid position relative to the emitter tip have been also investigated in order to find better device geometry for high-frequency application.

Original languageEnglish
Pages (from-to)2392-2394
Number of pages3
JournalIEEE Transactions on Electron Devices
Volume38
Issue number10
DOIs
Publication statusPublished - 1991
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)

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