This work has studied particulate growth process in silane rf discharges and found that they seem to grow rapidly even in a range of their size smaller than 40nm. To observe such rapid growth processes of particulates, a polarization-sensitive laser-light-scattering measurement system is developed, which has a good time resolution and a high sensitivity. Properties of particulates are derived from simultaneous measurements of three differently polarized components of light scattered by the particulates and are successfully determined in a range of size down to 10nm.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)