Simultaneous measurements of thermal conductivity and electrical conductivity of micro-machined Silicon films

H. Hagino, Y. Kawahara, A. Goto, K. Miyazaki

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Abstract

The in-plane effective thermal conductivity of free-standing Si thin films with periodic micropores was measured at -100 to 0°C. The Si thin films with micropores were prepared from silicon-on-insulator (SOI) wafers by standard microfabrication processes. The dimensions of the free-standing Si thin films were 200μmx150xmx2 μm, with staggered 4 μm pores having an average pitch of 4 mm. The Si thin film serves both as a heater and thermometer. The average temperature rise of the thin film is a function of its in-plane thermal conductivity. The effective thermal conductivity was calculated using a simple one-dimensional heat conduction model. The measured thermal conductivity was much lower than that expected based on classical model evaluations. A significant phonon size effect was observed even in the microsized structures, and the mean free path for phonons is very long even at the room temperature.

Original languageEnglish
Article number012020
JournalIOP Conference Series: Materials Science and Engineering
Volume31
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event6th EEIGM International Conference on Advanced Materials Research, AMR 2011 - Nancy, France
Duration: Nov 7 2011Nov 8 2011

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)

Fingerprint

Dive into the research topics of 'Simultaneous measurements of thermal conductivity and electrical conductivity of micro-machined Silicon films'. Together they form a unique fingerprint.

Cite this