Single-nanometer focusing of hard x-rays by Kirkpatrick-Baez mirrors

Kazuto Yamauchi, Hidekazu Mimura, Takashi Kimura, Hirokatsu Yumoto, Soichiro Handa, Satoshi Matsuyama, Kenta Arima, Yasuhisa Sano, Kazuya Yamamura, Koji Inagaki, Hiroki Nakamori, Jangwoo Kim, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa

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Abstract

We have constructed an extremely precise optical system for hard-x-ray nanofocusing in a synchrotron radiation beamline. Precision multilayer mirrors were fabricated, tested, and employed as Kirkpatrick-Baez mirrors with a novel phase error compensator. In the phase compensator, an at-wavelength wavefront error sensing method based on x-ray interferometry and an insitu phase compensator mirror, which adaptively deforms with nanometer precision, were developed to satisfy the Rayleigh criterion to achieve diffraction-limited focusing in a single-nanometer range. The performance of the optics was tested at BL29XUL of SPring-8 and was confirmed to realize a spot size of approximately 7nm.

Original languageEnglish
Article number394206
JournalJournal of Physics Condensed Matter
Volume23
Issue number39
DOIs
Publication statusPublished - Oct 5 2011
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Yamauchi, K., Mimura, H., Kimura, T., Yumoto, H., Handa, S., Matsuyama, S., ... Ishikawa, T. (2011). Single-nanometer focusing of hard x-rays by Kirkpatrick-Baez mirrors. Journal of Physics Condensed Matter, 23(39), [394206]. https://doi.org/10.1088/0953-8984/23/39/394206