Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch

Renshi Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    37 Citations (Scopus)

    Abstract

    Packaged large scale 1024 ch (32×32) mirror array switch module is presented for an optical cross-connect utilizing two-axis mirrors for beam steering. Besides being small, only 170×130 mm in size, the mirror array features a highly stable switching characteristics because of a tough mirror support and high-aspect-ratio torsion spring, very small warpage of ten nanometer order, and low applied voltage.

    Original languageEnglish
    Title of host publication2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages11-12
    Number of pages2
    ISBN (Electronic)0780375955, 9780780375956
    DOIs
    Publication statusPublished - Jan 1 2002
    EventIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland
    Duration: Aug 20 2002Aug 23 2002

    Publication series

    Name2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

    Other

    OtherIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
    CountrySwitzerland
    CityLugano
    Period8/20/028/23/02

    All Science Journal Classification (ASJC) codes

    • Hardware and Architecture
    • Control and Systems Engineering
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

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