Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch

Renshi Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

37 Citations (Scopus)

Abstract

Packaged large scale 1024 ch (32×32) mirror array switch module is presented for an optical cross-connect utilizing two-axis mirrors for beam steering. Besides being small, only 170×130 mm in size, the mirror array features a highly stable switching characteristics because of a tough mirror support and high-aspect-ratio torsion spring, very small warpage of ten nanometer order, and low applied voltage.

Original languageEnglish
Title of host publication2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages11-12
Number of pages2
ISBN (Electronic)0780375955, 9780780375956
DOIs
Publication statusPublished - Jan 1 2002
EventIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland
Duration: Aug 20 2002Aug 23 2002

Publication series

Name2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Other

OtherIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
CountrySwitzerland
CityLugano
Period8/20/028/23/02

Fingerprint

Torsional stress
MEMS
Aspect ratio
Mirrors
Switches
Crystals
Electrodes
Electric potential

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Sawada, R., Yamaguchi, J., Higurashi, E., Shimizu, A., Yamamoto, T., Takeuchi, N., & Uenishi, Y. (2002). Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 11-12). [1031419] (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2002.1031419

Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch. / Sawada, Renshi; Yamaguchi, J.; Higurashi, E.; Shimizu, A.; Yamamoto, T.; Takeuchi, N.; Uenishi, Y.

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. p. 11-12 1031419 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sawada, R, Yamaguchi, J, Higurashi, E, Shimizu, A, Yamamoto, T, Takeuchi, N & Uenishi, Y 2002, Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch. in 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest., 1031419, 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest, Institute of Electrical and Electronics Engineers Inc., pp. 11-12, IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002, Lugano, Switzerland, 8/20/02. https://doi.org/10.1109/OMEMS.2002.1031419
Sawada R, Yamaguchi J, Higurashi E, Shimizu A, Yamamoto T, Takeuchi N et al. Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc. 2002. p. 11-12. 1031419. (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). https://doi.org/10.1109/OMEMS.2002.1031419
Sawada, Renshi ; Yamaguchi, J. ; Higurashi, E. ; Shimizu, A. ; Yamamoto, T. ; Takeuchi, N. ; Uenishi, Y. / Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch. 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. pp. 11-12 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).
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