Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch

Renshi Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    37 Citations (Scopus)

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    Chemical Compounds

    Engineering & Materials Science