Single step method to deposit Si quantum dot films using H2 + SiH4 VHF discharges and electron mobility in a Si quantum dot solar cell

Masaharu Shiratani, Kazunori Koga, Soichiro Ando, Toshihisa Inoue, Yukio Watanabe, Shota Nunomura, Michio Kondo

Research output: Contribution to journalArticle

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Abstract

To fabricate quantum dot solar cells of a high efficiency at a low cost, here we propose a Si quantum dot film which is composed of Si nano-crystallites embedded into a-Si:H and a single step method to deposit such Si quantum dot films using H2 + SiH4 VHF discharges. For the method, Si nano-crystallites of a small size dispersion and radicals produced in the discharges are co-deposited on a substrate to form Si quantum dot films. Using the method, we realized a volume fraction of dots in films of 0.3-70%. Photo- and dark-conductivity of films are in a range of 10- 11-10- 9 and 10- 5-10- 4 S/cm, respectively. We have examined effects of the size dispersion of nano-crystallites on electron mobility in a quantum dot Si solar cell by a simulation. The electron mobility in films for a size dispersion of 0.37 nm is about 50% of that in films for no size dispersion.

Original languageEnglish
Pages (from-to)5468-5471
Number of pages4
JournalSurface and Coatings Technology
Volume201
Issue number9-11 SPEC. ISS.
DOIs
Publication statusPublished - Feb 26 2007

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Electron mobility
electron mobility
Semiconductor quantum dots
Solar cells
Deposits
solar cells
deposits
quantum dots
Crystallites
crystallites
Volume fraction
conductivity
Substrates
Costs

All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Single step method to deposit Si quantum dot films using H2 + SiH4 VHF discharges and electron mobility in a Si quantum dot solar cell. / Shiratani, Masaharu; Koga, Kazunori; Ando, Soichiro; Inoue, Toshihisa; Watanabe, Yukio; Nunomura, Shota; Kondo, Michio.

In: Surface and Coatings Technology, Vol. 201, No. 9-11 SPEC. ISS., 26.02.2007, p. 5468-5471.

Research output: Contribution to journalArticle

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AU - Inoue, Toshihisa

AU - Watanabe, Yukio

AU - Nunomura, Shota

AU - Kondo, Michio

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