Site-specific atomic and electronic structure analysis of epitaxial silicon oxynitride thin film on SiC(0001) by photoelectron and auger electron diffractions

Naoyuki Maejima, Fumihiko Matsui, Hirosuke Matsui, Kentaro Goto, Tomohiro Matsushita, Satoru Tanaka, Hiroshi Daimon

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Physics & Astronomy