Site-specific fabrication of polymer ultrathin films onto chemically heterogeneous surfaces

The purpose of this study is to establish the fundamental technology of site-selective coating of polymer thin film utilizing wetting contrast of line-patterned substrate. Line-patterned fluoroalkylsilane monolayer with lyophobic/lyophilic area (line width 1-20 μm) was prepared through VUV photolithography process. Lyophobic and lyophilic areas were terminated with silanol and fluoroalkyl groups, respectively. Microscopic droplets of a xylene solution of polystyrene (PS) were deposited on the micropatterned surface by the ink-jet method. On this surface, a macroscopic droplet of polymer solution shows anisotropic wetting behavior. The PS thin films were selectively formed on the micropatterned lyophilic areas.